High Throughput Laser-Assisted Near Field Nanoprocessing

该项目旨在为高通量和低成本的激光辅助纳米制造引入一种新的方法。研究表明，通过近场光学显微镜（NSOMs）实现纳米激光能量约束在精确表面改性方面具有巨大潜力。智能卓越基于NSOMs的方法能够以加法和减法的方式对各种材料系统进行激光辅助纳米级直写，具有卓越的特征分辨率和极其精确的位置。此外，自组装胶体微球阵列方法已经证明了高度一致和可重复的功能生产的可能性。在这些努力的基础上，我们将展示一个真正灵活的，无掩模和主动控制的nanomanufacturing系统的可行性，能够产生可扩展的吞吐量和任意图案的生产，通过光化学和光物理改性processes.Broader ImpactsThe生产的表面nanofeats有许多重要的应用在关键的新兴技术领域，包括制造的纳米机电一体化设备。该项目的完成将为纳米流体、掩模制造和修复以及纳米光刻的关键应用开辟道路。

This project aims at introducing a new approach for the high-throughput and cost-effective laser-assisted nanomanufacturing. Research done has shown the great potential of nanoscale laser energy confinement via near-field-optical microscopes (NSOMs) for precise surface modification.Intellectual Merit NSOM-based methods enable laser-assisted nanoscale direct writing of a diverse range of material systems in both additive and subtractive manner with superb feature resolution and extremely precise placement. Furthermore, the self-assembled colloidal microsphere array approach has proven the possibility of highly consistent and repeatable feature production. On the basis of these efforts, we will demonstrate the feasibility of a truly flexible, maskless and actively controlled nanomanufacturing system capable of yielding scalable throughput and arbitrary pattern production via photochemical and photophysical modification processes.Broader ImpactsThe production of surface nanofeatures has many important applications in critical emerging technology fields, including the fabrication of nano-electro-photo-mechanical integrated devices. Completion of this project will open the way to key applications on nanofluidics, mask fabrication and repair and nanolithography.