MECHANISM AND CONTROL OF CLEAN ROOM ROBOTS

本研究开发了一种新型的洁净室机器人。研制的洁净室机器人采用磁轴承作为关节支撑，无机械接触。它可以避免灰尘和油的产生从它的关节。除了清洁功能外，机器人在运动控制方面还应具有许多优点和功能，如无机械接触摩擦问题、力和刚度控制功能、末端微操作功能、外力测量功能以及振动主动控制等.从机理和控制的角度研究了磁轴承机器人关节的结构。研究了适用于磁悬浮关节的机器人操作臂结构.设计并制造了一种磁悬浮关节机器人，该关节安装在机器人的一部分关节和最重要的关节上。该机器人具有并联连杆臂机构和两个电机。机械手的末端由磁悬浮关节悬浮，可以进行功能检测.实验结果证实了磁轴承支撑的机器人操作器的可实现性。磁悬浮关节的主动控制使机器人具有上述优点和功能，作为进一步的研究，本文计划进行以下研究：（1）定量评估磁悬浮关节的性能;（2）考虑机器人动力学，以降低高速运动时的振动为目标，（3）研制出各关节驱动支撑机构无机械接触的洁净室机器人。

In this research, a new type of clean room robot is developed. The developed clean room robot uses magnetic bearings as its joints supporting with no mechanical contacts. It can avoid dust and oil generation from its joints. In addition to the cleanliness, the robot is expected to have many advantages and functions in its motion control, such as, no problems arising from friction of mechanical contact, function of force and stiffness control, function of micro manipulation of the tip, function of measuring the external force, and active vibration control.The following results are obtained in this research.1. The structure of robot joint using magnetic bearings is studied from the mechanism and control points of view. The structure of robot manipulator that is suitable for using magnetic bearing joints is investigated.2. A robot manipulator using magnetic bearing joints which are installed at a part of and the most important joints is designed and built. This prototype robot has parallel link arm mechanism and two motors. The tip of the manipulator is levitated by magnetic bearing joints and the functions can be examined.3. The experimental results confirm the realizability of the proposed robot manipulator that is supported by magnetic bearings. The active control of magnetic bearing joints makes the robot to have the above-mentioned advantages and functions.As the further study, the following investigations are planned, (1)evaluating the performance of magnetic bearing joints quantitatively, (2)taking the robot dynamics into consideration, aiming at the reduction of vibration at high speed motion, (3)development the perfect clean room robot that the driving and supporting mechanism of all joints has no mechanical contact.