Joint Research on Micro Fluid Control System

不同的应用需要集成了流量传感器、阀门、泵和流道的微流体控制系统。硅微机械加工可以集成传感器和信号处理电路以及用于批量生产一次性塑料微结构的微成型，可以用于制造用于微流体控制系统的微模块。开发了用于化学分析系统的采样模块，该模块利用表面张力来控制样品溶液和试剂的混合。表面张力在该体系中起着重要的作用。为了控制表面的疏水性，成功地开发了特氟龙和镍的脉冲共电镀。研究了用于批量生产小容量血样分析的一次性塑料模块的微成型技术。微模具是在东北大学利用硅的深度反应离子刻蚀(RIE)或数控高速铣床加工而成，热压成型由德国弗里堡大学进行，德国弗里堡大学是该项目的合作者。此外，还开发了使用紫外光固化树脂和紫外光透明硅橡胶模具的微成型。通过在硅芯片上光刻合成不同的DNA探针，研制出可用于低成本并行DNA诊断的DNA芯片。检测癌症启动子SNP的DNA芯片正在该芯片的基础上发展。制作了用于DNA芯片的点样头。开发了腐蚀性气体集成质量流量控制器，用于精密半导体工艺中的气体精细控制。不锈钢和氮化铝由于对氟化物和氯化物等卤素气体的惰性而被用作材料。

Micro fluid control systems which have integrated flow sensors, valves, pumps and flow channels are needed for different applications. Silicon micromachining which can integrate sensors and signal processing circuits and micro molding for mass production of disposable plastic microstructures can be used to fabricate micro modules for micro fluid control systems.Sampling module which uses surface tension for controlling the mixing of sample solution and reagent chemicals have been developed for chemical analyzing systems. Surface tension plays important roles in this system. To control hydrophobic properties of the surface, pulse co-electroplating of Teflon and nickel was successfully developed.Micro molding technology has been studied for the mass-production of disposable plastic module for analyzing small volume blood sample. Micro molds were fabricated by deep reactive ion etching (RIE) of silicon or using numerically controlled high speed milling machine in Tohoku University and the molding by hot embossing was carried out in Friburg University in Germany which is the collaborator in this project. In addition, micro molding using UV curable resin and UV transparent silicone rubber mold were developed. Immuno-reaction chip which has micro colume has been also fabricated.DNA chips which can be used for low cost parallel DNA diagnosis were developed by synthesizing different DNA probe photrolithographycally on a silicon chip. DNA chip for detecting SNP of cancer promoter is being developed based on the DNA chip. Spotting head for DNA chip was also fabricated.Integrated mass flow controller for corrosive gases was developed for fine gas control in sophisticated semiconductor processes. Stainless steel and aluminum nitride are used as the materials because of their inertness to halogen gasses as fluoride and chloride.