Research on Structure and Control of Functional Machine Joint

为了合理地实现纳米量级的高加工和高测量精度，对整个机床系统的各种误差因素进行研究是必要和必要的。在这样的系统中，决定加工和测量精度的极限和边界的最重要因素是存在于机床结构中的多个机械关节的机械和热特性。因此，为了构建未来的超精密机床或超精密测量机，开发具有主动功能的新型功能机械关节是必要的。然而，具有主动和多功能的机械关节迄今还没有被研究过。因此，本研究基于这一新概念开发了两种功能机械关节，即四球式和气垫层式。并将其作为工作台与精密工作台滚珠丝杠传动系统的连接机构，验证了这些功能关节的正确性和有效性。研究表明，所提出和研制的机械关节具有受控刚度、阻尼和热特性的功能。

In order to realize high machining and measuring accuracy of nano-meter order rationally, It is necessary and indispensable to investigate on various error factors on the whole machine system. In such a system, the most important factor determining the limit and boundary of machining and measuring accuracy is mechanical and thermal characteristics of many machine joints existing in a machine structure. Thus, it is necessary to develop the functional machine joint of new type having active functions in order to construct an ultra-precision machine tool or an ultra-precision measuring machine of the future.However, the machine joint having active and plural functions has not been investigated so far.Therefore, in this research, we developed two functional machine joints based on the new concept, i.e., the four-ball type and air-cushioned layer type. Furthermore, we ascertained the validity and effectiveness of those functional joints by incorporating them as the connecting mechanism between the table and its ball screw type driving system of a precision table. And it has been made clear that the proposed and developed machine joints have functions of controlled stiffness, damping and thermal characteristics.