Flexible micro motion-systems having distributed actuators

研究了具有分布式驱动器的微运动系统。这些系统包括在血管中像蛇一样移动的有源导管，具有二维阵列致动器的触觉显示设备，以及像风箱一样移动的静电致动器。本项目的主要研究对象是具有多接头结构和内外管的有源导管。关节是形状记忆合金（SMA）线圈，通过电流加热收缩，连接单元在6个方向上移动。已经开发了几种类型的由硅或聚合物制成的链接。用于通信和控制的集成电路和微组装方法也已被开发用于有源导管。为了在导管末端实现先进的超声成像装置，研制了PZT 1-3复合材料结构的微细加工工艺。微加工硅在陶瓷烧结过程中用作模具。研制了小尺寸光纤压力传感器和基于光波导和布拉格光栅的分布式弯曲传感器，并成功地开展了分布式柔性运动系统的研究，取得了预期的成果。

Micro motion-systems which have distributed actuators have been studied. These systems include active catheters which move like a snake in blood vessel, tactile display devices which has two-dimensional array actuators, and electrostatic actuators which move like bellows. The main subject of this project is the active catheters which have small multi-joint structures and inner and outer tubes. The joints are Shape Memory Alloy (SMA) coils which shrink by a current heating and the link-joint unit moves in 6 directions. Several types of which links are made of silicon or polymer have been developed. Integrated circuits for communication and control and micro-assembly method have been also developed for the active catheters. The active catheter can be multi-functional by incorporating sensors in it. For the purpose of advanced ultrasonic imaging devices at the end of catheter, microfabrication process for PZT 1-3 composite structures has been developed. Micromachined silicon is used as a mold during sintering of ceramics. Other sensors as small size optical fiber pressure sensors and distributed bending sensors which are made of optical wave guide and Bragg gratings have been also developed.The project on flexible motion systems using distributed actuators was successfully carried out and achievements have been obtained as planned.