Development of quantitative characterization method of microstructures by X-ray scattering

使用常规实验室X射线源从Si（001）光栅表面的高分辨率X射线衍射揭示了每个布拉格反射周围的分辨率受限的光栅干涉峰。结果表明，卫星峰的位置和强度提供了纳米尺度上光栅的周期、宽度以及侧壁粗糙度等结构信息，光栅制作在Si（001）表面上，其宽度、高度、周期和长度分别为0.8 μ m、10 μ m、4.5 μ m和6.5mm。光栅的数量为47。X射线衍射测量用Ge（220）沟道切割单色仪（CuKalpha_1）和位于检测器前面的Ge（220）沟道切割分析仪进行。用衍射仪自动程序在113和111布喇格点附近观察到卫星峰。两个衍射几何形状，高和低角度入射的几何形状，被选择为113布拉格点。在高角度的几何形状的卫星峰没有观察到，而-0.8mum分离的干扰峰在低角度的几何形状进行了测量。光栅的实际宽度可以从峰的位置估计。峰值的强度衰减给我们提供了光栅侧壁粗糙度的信息。此外，在111布拉格点附近的峰上观察到光栅周期的精细条纹。

High-resolution X-ray diffraction from a Si (001) grating surface using a conventional laboratory X-ray source reveals resolution-limited grating interference peaks around each Bragg reflection. As the results it was found that the positions and the intensities of the satellite peaks provide us with structural information such as the period and the width, as well as the roughness of the side walls of the gratings in a nanometer scale.The gratings were made on a Si (001) surface, of which width, height, period, and length were 0.8mum, 10mum, 4.5mum, and 6.5mm, respectively. The number of the gratings is 47. The X-ray diffraction measurements were performed with a Ge (220) channel-cut monochrometor (CuKalpha_1) and a Ge (220) channel-cut analyzer in front of the detector. The satellite peaks were observed around the 113 and 111 Bragg points by using the automatic program for the diffractometer. Two diffraction geometries, high- and low-angle incidence geometries, were selected for the 113 Bragg point. In the high-angle geometry the satellite peaks were not observed, while the interference peaks of the -0.8mum separation were measured in the low-angle geometry. The actual width of the gratings can be estimated from the positions of the peaks. The intensity decay of the peaks give us the information for the roughness of the side walls of the gratings. Furthermore, the fine fringes for the period of the gratings were observed on the peaks around the 111 Bragg point.