Mechanical Properties of CVD Diamond

CVD金刚石被认为具有优异的硬度和抗拉强度，因此有望应用于机械部件。然而，CVD金刚石并没有像我们预期的那样在工业上得到广泛应用。这主要是因为缺乏对CVD金刚石的机械性能的了解，这是由于使用传统金刚石加工技术制造试件的困难以及可用的高质量金刚石合成技术的缓慢进展造成的。本文介绍了CVD金刚石自支撑膜的抗弯强度，并采用三点弯曲试验对CVD金刚石自支撑膜的抗弯强度进行了测试。采用微波等离子体CVD、直流等离子体CVD、射频等离子体CVD和电弧放电等离子体喷射CVD等方法制备金刚石薄膜，并在金刚石砂轮抛光后用YAG激光切割。用于本试验的样本为10×3×（0.2-0.6）mm，在8 mm跨度上加载。

CVD diamond is hopeful about its applications to mechanical components as it is believed to have excellent hardness and tensile strength. However, CVD diamond has not been widely used in industry contrary to our expectations. This is mainly because of lack knowledge about the mechanical properties of CVD diamond caused by the difficulties of making test pieces using conventional diamond processing techniques and the slow progress of synthesis techniques for high quality diamond that is available. In this paper, the bending strength of free-standing CVD diamond films of CVD diamond films are described.The bending strength of free-standing CVD diamond films has been measured by three point bending test. Diamond films have been synthesized by microwave plasma CVD, DC plasma CVD, RF plasma CVD and arc discharge plasma jet CVD, and cut by YAG laser irradiation after polishing using diamond wheel. The specimens used for this test are 10×3×(0.2-0.6)mm and loaded over the span of 8 mm.