Science and technology of glass nanoimprint and its industrial applications

以原子阶梯蓝宝石(α-Al_2O_3单晶)板为模板，研究了硅酸盐玻璃原子尺度的纳米压痕表面修饰。蓝宝石模具规则地排列着直的原子台阶，均匀的高度约为0.2 nm，平台宽度约为80 nm。在压制过程中，蓝宝石模具和玻璃板的垂直位置显著影响印记玻璃表面的形貌。当模具放置在玻璃板上时，纳米图形转移到玻璃表面，而当玻璃板放置在模具上时，纳米图形在玻璃表面上形成。纳米条纹玻璃的维氏硬度高于无图案玻璃，且表面疏水性强于无图案玻璃。采用脉冲激光沉积(PLD)技术在纳米印迹玻璃衬底上制备了ITO薄膜。ITO薄膜的表面很好地反映了玻璃衬底表面的纳米图形。在纳米印迹玻璃上制备的ITO薄膜比在非图案化商业玻璃衬底上制备的ITO薄膜具有更强的结晶取向程度。在纳米印迹玻璃上沉积的ITO薄膜的电阻率比在非图案化商业玻璃上沉积的ITO薄膜的电阻率低约30%，这可能是由于纳米印迹玻璃表面的薄膜具有较高的结晶取向所致。

We investigated atomic-scale surface modifications of silicate glass by nanoimprint using an atomically stepped sapphire (α-Al_2O_3 single crystal) plate as nanopattern mold. The sapphire mold had regularly arranged straight atomic steps, with uniform height and terrace width of about 0.2 and 80 nm, respectively. During pressing, vertical positions of the sapphire mold and glass plate significantly affected the morphology of the imprinted glass surface. The nanopattern was transferred to the glass surface when the mold was set on the glass plate, while the nanowave pattern was formed on the glass surface when the glass plate was set on the mold. The Vickers hardness of the nanostriped glass was estimated to be higher than that of non-patterned glass, and the surface of the nanostriped glass was more hydrophobic than that of non-patterned glass. We fabricated indium tin oxide (ITO) thin films on nanoimprinted glass substrates using pulsed laser deposition (PLD). The surface of the ITO thin films well reflected the nanopattern of the glass substrate surface. The degree of crystalline orientation of the ITO thin films fabricated on the nanoimprinted glasses was more intense than that of the ITO thin films on the non-patterned commercial glass substrates. The resistivity of the ITO thin films deposited on the nanoimprinted glasses was lower by about 30% than that on the non-patterned commercial glasses, which was probably due to the higher crystal orientation of the films on the nanopatterned glass surfaces.