Microfabrication of RF-MEMS devices using synchrotron x-ray lithography

射频(RF)无线系统不断被推向更高的频率，而不断向更小、更节能和更便宜的无线设备发展的趋势正在严重挑战传统技术。射频微电子机械系统(RF MEMS)器件可以提供更好的隔离度、更低的功耗、更小的尺寸和重量，并有望在未来的无线应用中取代传统器件，甚至实现新的电路结构。基于同步加速器的深X射线光刻(XRL)是一种完全不同的微制造方法，使3D垂直墙结构能够达到数百微米甚至毫米的高度。3维技术的开发为新型射频器件提供了巨大的机遇，Kymyshyn博士的团队已经采用了同步加速器XRL工艺来生产高性能的射频耦合器、谐振器和可变阻抗结构。该研究项目在加拿大是独一无二的，也是美国萨斯喀彻温省、TRLabs和INST之间的国际合作。德国卡尔斯鲁厄(FZK)研究中心微结构技术研究所将继续开发新的垂直RF MEMS器件，并将这些器件扩展到更复杂的电路，如滤波器和双工器，以生产全新的结构。这项研究还将有助于在加拿大最大的科学项目之一的加拿大光源开发加拿大第一个XRL设施(SyLMAND-同步加速器微/纳米设备实验室)。目前正在建设中的SyLMAND将为加拿大研究人员提供XRL的独特能力，用于许多领域的应用，包括电信、航空航天、传感、微流体和医学。

Radio frequency (RF) wireless systems are constantly being pushed to higher frequencies, while continuing trends towards ever smaller, more power efficient, and cheaper wireless devices are severely challenging traditional technologies. RF micro-electro-mechanical-systems (RF MEMS) devices can offer improved isolation, lower power dissipation, and reduced size and weight, and are poised to replace conventional devices and even enable new circuit architectures in future wireless applications.Fabrication of RF MEMS devices is typically based on surface microfabrication techniques, restricting devices to flat 2D structures. Synchrotron-based deep X-ray lithography (XRL) is a fundamentally different microfabrication approach, enabling 3D vertical wall structures with heights of hundreds of microns or even millimetres. Exploiting the 3rd dimension offers tremendous opportunity for novel RF devices, and Dr. Klymyshyn's group has adapted synchrotron XRL processes to produce high-performance RF coupler, resonator, and variable impedance structures. The research program is unique in Canada, and also an international collaboration between USaskatchewan, TRLabs, and the Inst. of Microstructure Technology, Research Center Karlsruhe (FZK), Germany.Research will continue to develop new vertical RF MEMS devices, and also extend these to more complicated circuits such as filters and diplexers to produce entirely new structures. The research will also assist in developing Canada's first XRL facility (SyLMAND - Synchrotron Laboratory for Micro/Nano Devices), at the Canadian Light Source, one of the largest scientific projects in Canada. Currently under construction, SyLMAND will provide the unique capabilities of XRL to Canadian researchers for applications in many fields including telecom, aerospace, sensing, microfluidics, and medicine.