Large Area Deposition of Adherent Diamond-Like Carbon Thin Films on Plastics Using End-Hall Ion Sources

Intlvac Canada Inc.(Intlvac)希望开发用于阻隔和光学应用的塑料上的类金刚石薄膜 通过使用EHI来源，特别是在更大规模的生产中。然而，该公司在以下方面缺乏专业知识 DLC薄膜的沉积和表征，因此正在寻找该领域的专家进行合作。 该项目旨在发展萨斯喀彻温省大学杨博士之间的新研究伙伴关系 (S的U)和Intlvac关于开发大面积获得附着性类金刚石薄膜的加工技术 使用低成本的EHI来源生产聚酯(PET)。要解决的关键问题包括引入表面 不同的处理方法和不同的碳源可以提高DLC的沉积速率和粘附性。 杨博士一直致力于DLC、钻石和其他物理/化学气相沉积薄膜的研究 三十年了。她的团队已经成功地开发了许多合成钻石基材的创新技术 不同衬底上的薄膜。特别是，她的团队已经成功地存放了高质量的粘附者DLC 使用EHI离子源在聚四氟乙烯、钛和硅上沉积薄膜。另一方面，Intlvac是气相沉积领域的先驱 薄膜沉积设备。具体地说，该公司成功地开发了离子束 具有EHI源的沉积(IBD)系统。显然，两个合作伙伴都有互补的专业知识和 设备，因此杨博士的团队和Intlvac之间的合作伙伴关系的发展将产生 强大的协同性，解决了将DLC用作屏障和光学涂层的问题，最后 将新系统/产品商业化，以满足该地区市场日益增长的需求。完成 该项目将为加拿大带来巨大的经济效益，因为它既是具有多个EHI来源的IBD系统 而合成技术可以直接推向市场，充分利用其优异的性能 用于各种工业和生物医学应用的DLC。此外，新的流程将使大型 在塑料上生产DLC，这将使食品/饮料容器和 生物医学植入物，最大限度地减少污染和浪费，提高生活质量。

Intlvac Canada Inc. (Intlvac) desires to develop DLC thin films on plastics for barrier and optical applications by using the EHI sources, particularly on larger scale production. However, the company is lack of expertise in deposition and characterization of DLC thin films and thus looking for experts in the area for collaboration. This project aims to develop new research partnerships between Dr. Yang at the University of Saskatchewan (U of S) and Intlvac on developing processing techniques to obtain adherent DLC thin films on large area polyester (PET) by using low cost EHI sources. The key issues to be addressed include introduction of surface treatments and different carbon sources to increase the deposition rates and the adhesion of DLC. Dr. Yang has been working on DLC, diamond, and other physical/chemical vapor deposited thin films for thirty years. Her team has successfully developed many innovative techniques for synthesizing diamond based thin films on various substrates. Especially, her team has successfully deposited high quality adherent DLC films on PTFE, Ti, and Si using an EHI ion source. On the other hand, Intlvac pioneers in vapor deposition equipment for thin film deposition. Specifically, the company has successfully developed Ion Beam Deposition (IBD) system with EHI sources. It is evident that both partners have complementary expertise and equipment, and thus the development of a partnership between Dr. Yang's group and Intlvac would produce strong synergy for addressing the issues in using DLC as barrier and optical coatings, and finally commercialize new systems/products to meet the increasing demands of markets in the area. The completion of the project will produce enormous economic benefit to Canada as both the IBD system with multi EHI sources and synthesis techniques can be directly delivered to the markets to make full use of the outstanding properties of DLC for various industrial and biomedical applications. Furthermore, the new processes will enable large area production of DLC on plastics, which will enable much improved food/beverage containers and biomedical implants, minimizing pollution and wastage and improving life quality.