Microelectromechanical Low-power Strain Sensor for Structural Health Monitoring Applications

适用于飞机结构健康监测(SHM)的应变传感器通常不小型化或需要大量电力，导致访问受限位置的困难、沉重的布线以及频繁且昂贵的电池维护。微电子机械系统(MEMS)可以减小这些传感器的尺寸和功耗。然而，相关的传感电子设备需要相当大的功率来调节来自MEMS传感器的模拟信号。为了解决这一问题，IPR公司提出了一种数字输出MEMS传感器设计，以及监控低功率电子设备，该设计是为飞机的SHM量身定做的紧凑外形因素和低功率信号方案。IPR的MEMS传感器基于直接接触结构，允许对移动航天飞机质量的应变变化进行开/关类型的检测。这一独特而有效的解决方案将使IPR能够创建一种负担得起、能效高的应变传感SHM系统。然而，目前的解决方案存在许多微细加工成品率问题，其接触式传感方案仍然存在问题。这就要求重新审视当前的应变传感器设计，并将其应用于稳定可靠的商业MEMS制造工艺。IPR希望通过这个Engage Plus项目继续与ETS的Frederic Nabki教授合作，完善先前Engage项目中提出的MEMS应变传感器设计，并对制造的初始原型进行表征。该传感器稍后将集成到IPR的定制低功耗接口电子设备中，以实现SHM的完整应变传感系统。该项目是IPR低功耗和紧凑型应变传感器的关键组成部分，将成为IPR迈向领先市场地位的跳板。由该项目产生的创新的MEMS设备最终将使新型传感器网络的实施成为可能，这些传感器网络非常适合于各种传统上无法到达的环境。该项目将为HQP(一名研究专业人员，一名硕士研究生和

Strain sensors suited for the structural health monitoring (SHM) of airplanes are often not miniaturised orrequire significant amounts of power, leading to difficulties in accessing constrained locations, prohibitivelyheavy cabling, and frequent and expensive battery maintenance. Microelectromechanical systems (MEMS) canreduce the size and power consumption of these sensors. However, the associated sensing electronics requiresignificant amounts of power to condition the analog signals from the MEMS transducer.To resolve this, IPR inc. is proposing a digital-output MEMS transducer design, along with the monitoringlow-power electronics, that is tailored for SHM of airplanes in a compact form-factor and low-power signalingscheme. IPR's MEMS transducer is based on a direct contact structure that allows for on/off type of detectionof a strain variation that moves a shuttle mass. This unique and effective solution will allow IPR to create anaffordable and power efficient strain sensing SHM system. However, the current solution has metmicro-fabrication yield issues and questions remain regarding its contact-based sensing scheme. This requiresthe current strain transducer design to be revisited and its implementation in a stable and robust commercialMEMS fabrication process. IPR wants to continue its collaboration with Prof. Frederic Nabki at ETS throughthis Engage Plus project to refine the MEMS strain sensor design proposed in the previous Engage project andcharacterise the initial prototypes fabricated. This transducer will later be integrated within IPR's customlow-power interface electronics to implement a complete strain sensing system for SHM.This project is a key building block of IPR's low-power and compact strain sensor, and will be a springboardtowards a leadership market position. The innovative MEMS device resulting from this project will ultimatelyenable the implementation of novel network of sensors well-suited to various traditionally inaccessibleenvironments. This project will provide training for HQP (one research professional, one master's student an