Metalorganic Chemical Vapor Deposition of High Temperature Superconducting Films

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Metalorganic chemical vapor deposition of metallic oxides is an established technology in the electronics industry for production of thin film insulators and transparent conductors with tailored properties. Applied to the new superconducting ceramic materials this process could produce films in oxygen which do not require sintering, films which may grow epitaxially on single crystal substrates and films of exceptionally high purity with uniform composition and crystal phases. The objective of Phase I is to demonstrate that metalorganic chemical vapor deposition of yttrium-barium-copper-oxide on zirconia, alumina, coated alumina or strontium titanate yields a uniform superconducting film with a smooth surface.