Hydrogen in Silicon Dioxide Thin Films Studied by Nuclear Magnetic Resonance

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.he goal of the research is to provide new experimental data in order to evaluate scientific theses on the role of hydrogen in silicon dioxide and to provide a basis for atomic-scale modeling of this materials system. Nuclear magnetic resonance is being used to determine the atomic bonding configuration of hydrogen atoms in silicon dioxide grown by thermal and chemical vapor deposition techniques. The data will be analyzed in terms of oxidation kinetics, passivation and electronic defects in silicon dioxide.