Development of a Scanning Electron Microscope Based Microcharacterization Facility

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This award is for the development of an SEM-based micro- characterization facility, with optimized cathodoluminesence and charge collection capabilities for electronic materials research. A demonstration model scanning electron microscope and components for cathodoluminesence and charge collection studies will be purchased. Current areas of materials research include selective area growth of heteroepitaxial semiconductors, large bandgap semiconductors, and fine particles. Cathodoluminesence and charge collection are characterization methods essential for addressing issues such as materials uniformity, analysis of luminesence in wide bandgap materials, stress distributions in selective epitaxial growth, and degradation of optoelectronic devices. The SEM will have full variable temperature capability and microscopy and spectroscopy modes. Examples of researchproposed include selective area GaAs/Si, diamond films, SiC films and quantum well devices. Researchers and students from several of the departments at the University ofCalifornia-Los Angeles will make use of this instrument.