Development of sample preparation methods for atom probe microanalysis

为了将原子探针技术应用于薄膜、非金属等非典型样品的纳米分析，发展了FIM针尖制备方法。通过光刻和微电抛光的结合，我们建立了一种从金属薄膜制备FIM针尖的常规方法。同时，我们开发了一种离子磨孔孔，它可以将非金属丝磨尖成锋利的FIM尖端。用这些方法成功地用原子探针技术分析了各种样品，如磁性薄膜、晶界等。目前正在对用于制备半导体针尖的离子研磨方法进行评估。

In order to apply the atom probe technique to the nanoscale analysis of atypical specimens such as thin film specimen and non-metallic materials, FIM tip preparation methods were developed. By a combination of photolithography and micro-electropolishing, we have established a routine method for preparing FIM tips from metallic thin films. At the same time, we have developed an ion milling aperatus, which can sharpen non-metallic wires to sharp FIM tips. By these methods, wide variety of specimens such as magnetic thin films, grain boundaries were successfully analyzed by the atom probe technique. The evaluation of the ion milling method for preparing semiconductor tips is now in progress.