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Formation of High Corrosion Resistant Artificial Passivation Films by LP-MOCVD

LP-MOCVD 形成高耐蚀人工钝化膜

基本信息

批准号：
03650565
负责人：
HARA Nobuyoshi
金额：
$ 1.34万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650565/
关键词：
Chemical vapor deposition MOCVD Artificial passivation film Corrosion resistance Ellipsometry Composite oxide film エリプソメトリ-

项目摘要

Single oxide films of Al_2O_3, TiO_2, Ta_2O_5, ZrO_2 and SiO_2, and composite oxide Films of Fe_2O_3-Cr_2O_3-NiO and Ta_2O_5-ZrO_2 have been formed on Pt substrates by metal organic chemical vapor deposition (MOCVD) technique. The corrosion resistance of these films were examined in 5M-HCl and 5M-NaOH by the measurement of film thickness using ellipsometry and the chemical analysis of test solutions using inductively-coupled plasma-emission spectroscopy.It was found that the corrosion resistance of the single oxide films increased in the following order: Al_2O_3<TiO_2<SiO_2<ZrO_2<Ta_2O_5 in 5M-HCl, and Al_2O_3<SiO_2<TiO_2<Ta_2O_5<ZrO_2 in 5M-NaOH. Composite oxide films of Ta_2O_5-ZrO_2 having cationic mass fraction of Ta^<5+> ions between 0.3 and 0.5 showed the highest corrosion resistance against both the HCl and NaOH solutions. The dissolution rate of Fe_2O_3-Cr_2O_3 composite films in 5M-HCl decreased exponentially with an increase in the cationic mass fraction of Cr^<3+> ions, X_<cr>, of the films. The same type of changes in the dissolution rate with X_<cr> was also observed for the NiO-Cr_2O_3 composite films. On the other hand, the addition of NiO to Fe_2O_3-Cr_2O_3 composite films containing adequate amount of Cr_2O_3 did not bring an effective improvement in corrosion resistance. The corrosion resistance of SiO_2-coated SUS304 stainless steels increased with increasing thickness and formation temperature of the SiO_2 films.

用金属有机化学气相沉积（MOCVD）技术在Pt衬底上制备了Al_2O_3，TiO_2，Ta_2O_5，ZrO_2和SiO_2单一氧化物膜以及Fe_2O_3-Cr_2O_3-NiO和Ta_2O_5-ZrO_2复合氧化物膜。通过椭圆偏振法测量膜厚和电感耦合等离子体发射光谱法分析测试溶液，研究了这些膜在5 M-HCl和5 M-NaOH中的耐腐蚀性，发现单个氧化膜的耐腐蚀性按以下顺序增加：在5 M-HCl中，Al_2O_3<TiO_2<SiO_2<ZrO_2<Ta_2O_5，在5 M-NaOH中，Al_2O_3<SiO_2 <TiO_2<Ta_2O_5<ZrO_2。Ta_2O_5-ZrO_2复合氧化膜中Ta^<5+>离子的阳离子质量分数在0.3 ~ 0.5之间时，在HCl和NaOH溶液中的耐蚀性最好。Fe_2O_3-Cr_2O_3复合膜在5 M-HCl中的溶解速率随膜中Cr^<3+>离子的质量分数X_的增加呈指数下降<cr>。NiO-Cr<cr>_2 O_3复合膜的溶解速率也随X_2的变化而变化。而在含有适量Cr_2O_3的Fe_2O_3-Cr_2O_3复合膜中加入NiO并不能有效提高膜的耐蚀性。随SiO_2膜层厚度和成膜温度的增加，SUS 304不锈钢的耐蚀性提高。