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1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法

实现1nm表面异物缺陷自主搜索的动态相位差检测式近场液相探针测量方法

基本信息

批准号：
21K18668
负责人：
高橋哲
金额：
$ 4.08万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Challenging Research (Exploratory)
财政年份：
2021
资助国家：
日本
起止时间：
2021-07-09 至 2024-03-31
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21K18668/
关键词：
異物検出ナノ欠陥ナノ異物シリコンウエハ表面欠陥表面検査

项目摘要

従来半導体プロセスにおいて現場適用されていた光学的散乱型計測法原理では物理的検出限界となっていた超平滑加工表面のナノ付着異物計測法について新光学システムの提案，開発を目指す．具体的には，基板上に滴下した揮発性不活性溶媒の液相界面とナノ異物との近接場における力学的・光学的相互作用を，並列情報処理性，現場適用性の高い遠隔場光学技術で取得することで，非破壊性，高速性を維持したまま，従来異物サイズ検出限界を打破可能な新概念近接場計測プローブ法の開発において，動的位相差検出が可能な新しい概念の光学システムの適用を提案し，1nm表面異物欠陥計測実現への可能性を，理論・実験の両面から検討する．本年度は，前年度に開発した動的位相差顕微基礎実験装置を用いて，ナノ欠陥時に生じる薄膜変動を高感度で検出可能であるか実験的試行を行った．

The principle of optical scattering-type measurement method for field application of semiconductor materials in recent years, the detection limit of physics, the ultra-smooth machined surface and the measurement method for foreign matter in recent years, and the proposal of new optical systems for field application are pointed out. Specifically, the liquid phase interface of the inert solvent dropped on the substrate, the mechanical and optical interaction of the foreign matter and the near contact field, the parallel information processing property, the field applicability, the high and far field optical technology, the non-destructive property, the high speed property, the detection limit of the foreign matter and the possibility of breaking the new concept of the near contact field measurement method, A new concept of optical system is proposed for the possibility of detecting the phase difference of a moving object. The possibility of detecting the impurity on a 1nm surface is discussed theoretically and practically. This year, compared with the previous year, the phase difference micro-basic control device developed in the previous year has been put into use, and the time delay has been generated. The film motion has been detected with high sensitivity. The trial operation has been carried out.