Preparation of parallel type high density magnetic random access memory

并行型高密度磁性随机存储器的制备

• 批准号: 09650386
• 负责人: NAWATE Masahiko
• 金额: $ 2.18万
• 依托单位: Shimane University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650386/
• 关键词: random access memory; MRAM; parallel type; microfabrication; magnetic material; giant magnetoresistance; sandwich structure; 磁気ランダムアクセスメモリ

Prototype of Magnetic Random Access Memory (MRAM) was prepared by using thin film deposition and microfabrication techniques. MRAM of 1 bit pattern was made from magnetoresistive layer (FeCo/Cu/FeCo sandwich structure), upper and lower insulating layers and upper and lower electrode wires. Insulating layers were inserted in order to make partial electric contact between the magnetoresitive layer and electrodes, so that the electric current for read-out runs through the magnetoresistive layer along the film plane, which is necessary for effective detection. Writing operation was carried out with external electromagnet and the memory operation was confirmed.In preparing the MRAM device the most important technique is the microfabrication. Vacuum Evaporation with Creeping Substrate (VECS) technique was also invented in this study, to improve the fabrication technique.

采用薄膜沉积和微细加工技术制备了磁随机存取存储器(MRAM)原型。由磁阻层(FeCo/Cu/FeCo夹心结构)、上下绝缘层和上下电极线组成1bit图形的MRAM。在磁阻层和电极之间插入绝缘层，以使读出电流沿薄膜平面流经磁阻层，这是有效检测所必需的。在MRAM器件的制备过程中，最关键的技术是微细加工。本研究还发明了蠕变衬底真空蒸发(VECS)技术，以改进制备工艺。

项目成果

S.Honda, T.Okada, M.Nawate and M.Tokumoto: ""Tunneling giant magnetoresistance in heterogeneous Fe-SiO2 granular films"" Phys.Rev.B56-22. 14566-14573 (1997)

S.Honda、T.Okada、M.Nawate 和 M.Tokumoto：“异质 Fe-SiO2 颗粒薄膜中的隧道巨磁阻”Phys.Rev.B56-22。

S.Honda, H.Yamane, M.Nishino and M.Nawate: ""Granular type giant magnetoresistance of Co-Ag and FeCo-CoAg films deposited with tandem method"" J.Magn.Magn.Mater.[in press].

S.Honda、H.Yamane、M.Nishino 和 M.Nawate：““采用串联方法沉积的 Co-Ag 和 FeCo-CoAg 薄膜的颗粒型巨磁阻””J.Magn.Magn.Mater.[正在出版]。

S.Honda, K.Koguma, M.Nawate, I.Sakamoto: "Magnetic properties and giant magnetoresistance of Fe/Au multilayers" J.Appl.Phys.82・9. 4428-4434 (1997)

S.Honda、K.Koguma、M.Nawate、I.Sakamoto：“Fe/Au 多层膜的磁特性和巨磁阻”J.Appl.Phys.82・9（1997）。

S.Honda, T.Okada and M.Nawate: ""Size effect on giant magentoresistance of Co-Ag films"" J.Magn.Magn.Mater.165. 326-329 (1997)

S.Honda、T.Okada 和 M.Nawate：“Co-Ag 薄膜巨磁阻的尺寸效应”J.Magn.Magn.Mater.165。

S.Honda, H.Yamane, M.Nishino, M.Nawate: "Granular type giant magnetoresistance of Co-Ag and FeCo-CoAg films deposited with tandem method" J.Magn.Magn.Mater. (印刷中).

S.Honda、H.Yamane、M.Nishino、M.Nawate：“采用串联方法沉积的 Co-Ag 和 FeCo-CoAg 薄膜的颗粒型巨磁阻”J.Magn.Magn.Mater（正在出版）。