CMOS Process Sensors and Design Methodology in Advanced Technology Nodes

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FinFETs (Fin Field Effect Transistors) are the most advanced VLSI fabrication technology currently available. They are designed to extend the performance of CMOS technology beyond the Moore's law. The current VLSI product cycles are far shorter than the roll out of new generations of fabrication processes. FinFET circuit designers often have to start conceiving and designing new products before all the information in the process design kit (PDK) from the silicon foundry is ready. As a result, designers often have to perform a semi-blinded design, with the anticipation that the fabricated FinFET based VLSI prototypes will conform to the simulated performance. In this collaborative project with HiSilicon (a subsidiary of Huawei Canada), we will develop design techniques to enhance the chance of first time success for highly complex VLSI chips with billions of transistors and 100's man-year of development time/cost. We intend to fabricate VLSI prototypes on pre-released version of 7 nm FinFET technology (and later 5 nm) from Taiwan Semiconductor Manufacturing Company Limited (TSMC, the world's largest silicon foundry) for wireless telecommunication applications. In particular, this project has two main objectives. The first one is to improve the monitoring of the electrical characteristics of the FinFETs and peripheral components (e.g. capacitors, resistors, metal contacts, and metal interconnects, etc.) at on-chip level. The second objective is to develop process-tolerant circuit design techniques that can be self-adapted to any slight changes in device characteristics due to process variations and aging.Canada is the only G8 nations that does not have any mega-fab facility. However, we continue to be a world leader in nurturing fabless VLSI design houses, providing leading edge designs for global needs. The training of highly qualified personnel (HQP) with advanced VLSI design skills is essential to support the expanding electronics, communication and automotive industries in Canada.