Hydrogen in Silicon Dioxide Thin Films Studied by Nuclear Magnetic Resonance

．该研究的目的是为评价氢在二氧化硅中的作用的科学论文提供新的实验数据，并为该材料体系的原子尺度建模提供基础。核磁共振被用来确定由热和化学气相沉积技术生长的二氧化硅中氢原子的原子键合结构。数据将在氧化动力学，钝化和二氧化硅的电子缺陷方面进行分析。

.he goal of the research is to provide new experimental data in order to evaluate scientific theses on the role of hydrogen in silicon dioxide and to provide a basis for atomic-scale modeling of this materials system. Nuclear magnetic resonance is being used to determine the atomic bonding configuration of hydrogen atoms in silicon dioxide grown by thermal and chemical vapor deposition techniques. The data will be analyzed in terms of oxidation kinetics, passivation and electronic defects in silicon dioxide.