Ion and Thermal-Induced Transformations in Germanium- Silicide and Aluminide Systems

这项研究是康奈尔大学、加州大学圣地亚哥分校和美国电话电报公司贝尔实验室的合作成果。这项研究研究了锗硅化物和铝化物材料中的离子和热致相变。这项努力是对一项高产出的赠款的续展奖(DMR-8618761)(超过25篇科学文献和3个博士学位)。(1)从非晶态合金中异质外延生长锗硅化物系统，包括离子诱导异质外延和有无传输介质的固相外延；(2)金属/锗硅化物反应；(3)铝/铂和铝钯系统中非晶相和亚稳晶相的形成。用离子束辐照和热退火方法研究了多层膜和共沉积材料体系。主要的分析技术有卢瑟福背散射光谱、X射线衍射、透射电子显微镜和电学性质测量。康奈尔大学的工作重点是电子显微镜和卢瑟福背散射；加州大学圣地亚哥分校的X射线衍射和电学表征；AT&amp；T贝尔实验室，离子束研究。这三个小组在样品制备方面都有能力。

The research is a collaborative effort between Cornell University, University of California at San Diego, and AT&T Bell Laboratories. The research investigates ion- and thermal- induced transformations in germanium silicide and aluminide materials. The effort is a renewal award (DMR-8618761) for a grant that was highly productive (more than twenty five publications in the scientific literature and three Ph.D. degrees). The research has three thrusts: (1) heteroepitaxial growth of germanium silicide systems from amorphous alloys including ion-induced heteroepitaxy, and solid phase epitaxy with and without transport medium, (2) metal/germanium silicide reactions, (3) amorphous and metastable crystalline phase formation in aluminum/platinum and aluminum palladium systems. Ion beam irradiation and thermal annealing are used to investigate systems of multilayered and co-deposited materials. T^he primary analytical techniques are Rutherford backscattering spectroscopy, x-ray diffraction, transmission electron microscopy, and electrical property measurements. The effort at Cornell emphasizes electron microscopy and Rutherford backscattering; University of California at San Diego, x-ray diffraction and electrical characterization; AT&T Bell Laboratories, ion beam research. All three groups have capability in the area of specimen preparation.