NER: Nanoscale Laser-assisted Deposition and Crystal Growth

该项目是响应纳米科学与工程倡议NSF 01-157，类别NER而收到的。将对纳米结构的激光化学气相沉积（LCVD）进行探索性研究。实验将进行利用近场扫描光学探针（NSOM），以限制激光照射的影响，只有几十纳米的横向尺寸。研究的主要目标是通过NSOM-LCVD工艺在指定位置完成纳米特征的沉积和写入。不同的沉积/基板系统将进行研究。这种方法将导致控制晶体生长和三维复杂纳米结构的制造。洞察力将获得在纳米沉积，成核和晶体生长过程中的复杂的热化学物理现象的基本机制。表面纳米特征的产生在关键的新兴技术领域中具有许多重要的应用，包括纳米电-光-机械集成电路的制造。该研究的目标是开发具有定制纹理，光学和机电性能的纳米结构表面的新工艺。这些过程将在功能纳米器件的制造和异质集成中无处不在。加州大学伯克利分校的几个现有项目将被利用，以扩大研究对教育和推广的影响，并用于识别，招募和吸引来自代表性不足的群体和少数民族的研究生研究人员。预计这项研究将成为博士论文的主要部分，而本科生也将作为实验室助理参与研究。在这个项目中开发的研究成果，程序和专业知识将通过课程和研讨会（包括新生研讨会）传达给研究生和本科生。

This project was received in response to the Nanoscale Science and Engineering initiative NSF 01-157, category NER. Exploratory research will be conducted on the laser chemical vapor deposition (LCVD) of nanostructures. Experiments will be carried out utilizing near filed scanning optical probes (NSOMs) in order to confine the effects of the laser irradiation to lateral dimensions of only a few tens of nanometers. The main objective of the research is to accomplish deposition and writing of nanofeatures at specified locations via NSOM-LCVD processes. Different deposition/substrate systems will be investigated. This approach will lead to controlled crystal growth and fabrication of complex nanostructures in three dimensions. Insight will be gained on the fundamental mechanisms of the complex thermo-chemo-physical phenomena during the nanoscale deposition, nucleation and crystal growth processes. The production of surface nanofeatures has many important applications in critical emerging technology fields, including the fabrication of nano-electro-photo-mechanical integrated circuits. The goal of the research is to develop novel processes for nanostructuring surfaces with tailor-made texture, optical and electromechanical properties. These processes will be of ubiquitous use in the fabrication and heterogeneous integration of functional nanoscale devices. Several existing programs at UC Berkeley will be leveraged in order to broaden the impact of the research on education and outreach and utilized to identify, recruit and attract graduate student researchers from underrepresented groups and minorities. It is expected that the research will form a major part of a doctoral dissertation, while undergraduate students will also participate in the research as laboratory assistants. The research results, procedures and expertise developed in this project will be communicated to both graduate and undergraduate students through coursework and seminars (including a freshman seminar).