Contactless RF MEMS Switches

0601723 Kim本研究的目的是推进非接触开关的基础科学和技术，对于5瓦功率级的微波信号，功率隔离比大于100：1。该开关能够进行热切换，并且由于其非接触模式，在热切换中也非常可靠，这消除了与金属对金属和金属对电介质接触相关的所有材料挑战。这种非接触式方法对于微波开关来说是全新的，并且需要在双边夹持桥的压电致动的基础科学和技术方面取得重大进展。该方法是使用一种新颖的组合的可变电容器和固定的片上电感器，使电源隔离比为100：1，可以得到一个电容变化仅为10：1。高功率处理能力是通过一个巧妙的设计实现的，即在两个固定电极的中间放置一个可变形的桥，电极之间有空气间隙，以平衡通过开关的高微波功率所产生的静电力。智力优点：该研究将提高微波开关的可靠性和功率处理能力，用于无线收发器中的信道选择和波束形成。通过相控天线阵控制在商业无线通信和军事跟踪/制导系统中的潜在应用是众多的。更广泛的影响：随着无线通信变得无处不在，拟议中的开关对社会的影响将是巨大的。拟议的研究还将推进基础科学和技术，具有广泛的适用性，微波微系统，结构工程和压电致动的微结构等，PI计划创建一个网页，提供有价值的知识和实践的见解，射频MEMS开关，压电致动桥，残余应力控制，网络传播的教育影响将是巨大的，因为（1）PI致力于为读者提供富有成效的信息，（2）读者获得RF MEMS方面有价值的实践知识的难得机会，并且在不断增长的无线通信中日益重要。

0601723KimThe objective of this research is to advance the fundamental science and technology for a contactless switch with a power isolation ratio of greater than 100:1 for microwave signals of 5 Watt power level. This switch is capable of hot switching and also is very reliable in hot switching, due to its non-contact mode, which eliminates all material challenges associated with metal-to-metal and metal-to-dielectric contacts. This contactless approach is brand new for microwave switches, and requires significant advancement in the fundamental science and technology for piezoelectric actuation of two-edges clamped bridges. The approach is to use a novel combination of variable capacitors and fixed on-chip inductors, so that a power isolation ratio of 100:1 can be obtained with a capacitance variation of mere 10:1. The high power handling capability is achieved by a clever design of placing one deformable bridge in the middle of two stationary electrodes with air gaps between them, in order to balance the electrostatic forces stemming from the high microwave power passing through the switch.Intellectual merit: This research will improve the reliability and power-handling capability of microwave switches for channel selection in a wireless transceiver and beam forming/steering through phased antenna array. The potential applications to commercial wireless communication and military tracking/guidance systems are numerous. Broader Impact: As wireless communication becomes ubiquitous, the impact of the proposed switch on society will be immense. The proposed research will also advance the fundamental science and technology that has broad applicability to microwave microsystems, structural engineering and piezoelectric actuation of microstructures, etc. The PI plans to create a web page that presents valuable knowledge and hands-on insight on RF MEMS switches, piezoelectrically actuated bridges, residual stress control, etc. The educational impacts of the web disseminations will great due to (1) the PIs commitment to make it fruitful for the readers and (2) the unusual opportunities for the readers to obtain valuable, hands-on-knowledge on RF MEMS, and increasingly important field in the ever growing wireless communications.