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Development of an Ultraprecise and Ultrahigh-speed Rotating Mechanism by using a Micro Spherical Ultrasonic Motor

Development of an Ultraprecise and Ultrahigh-speed Rotating Mechanism by using a Micro Spherical Ultrasonic Motor
利用微型球形超声波电机开发超精密超高速旋转机构
批准号:
12450065
负责人:
TOYAMA Shigeki
金额:
$2.56万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2000
资助国家:
日本
项目状态:
已结题
起止时间:
2000 至 2002

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中文摘要
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英文摘要
We have developed a high precision and high speed rotary of a multi-degree-of ? freedom stage. The stage consists of a semi sphere rotor and three stators. Applying alternative voltage to the piezoelectric ceramics adhered to the stators, travelling elastic vibration is generated to drive the rotor. We can control the travelling wave number to rotate it precisely (less than 1/1000 degree). Furthermore we have found that the stage is possible to perform the positioning operation in three rotational degrees with 1/1000 degree or less in several micro seconds within ±3 degrees.
期刊论文(24)
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会议论文
遠山 茂樹: "Control Method for a Spherical Ultrasonic Motor"the ICMA' 02 on Human-Friendly Reliable Mechatronics. 387-394 (2002)
Shigeki Toyama:“球形超声波电机的控制方法”ICMA 02 关于人类友好的可靠机电一体化 (2002)。
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通讯作者:
遠山 茂樹: "Control Method for a Spherical Ultrasonic Motor"the ICMA'02 on Human-Friendly Reliable Mechatronics. 387-384 (2002)
Shigeki Toyama:“球形超声波电机的控制方法”ICMA02 人性化可靠机电一体化。387-384 (2002)
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遠山 茂樹: "Development of an Ultrasonic Motor as a Fine-Orienting Stage"IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION. Vol.17,NO.4. (2001)
Shigeki Toyama:“作为精确定向平台的超声波电机的开发”IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION Vol.17,NO.4 (2001)。
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12
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