Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

我们开发了一个智能纳米加工和测量系统与金刚石探针阵列集成与压电传感器和执行器。为了实现这一系统，我们首先研究了金刚石薄膜的各种微加工技术。然后，我们开发了一种批量制造工艺的金刚石原子力显微镜探针。金刚石探针是通过选择性沉积来制作的，用于图案化金刚石悬臂和Si模具技术，用于产生尖锐的金刚石尖端，以及将玻璃背板阳极结合到金刚石基底的技术，金刚石探针已经附着到该基底上，以便于处理。通过有限元模拟优化设计了用于接触式AFM测量的金刚石探针，探针由两种弹簧常数分别为1 N/m和5 N/m的V形悬臂梁组成。此外，我们还在金刚石薄膜上制备了锆钛酸铅（PZT）薄膜，并对PZT薄膜的结构进行了研究。 ...更多信息 Iamond薄膜衬底，并检查其压电性能。本文对室温下溅射在金刚石薄膜衬底上的PZT薄膜进行了N_2气氛下的快速热退火处理。在升温速率为10℃/s、退火温度为700℃的条件下，沉积的PZT薄膜发生了向钙钛矿结构的相变。然而，<31>由于金刚石薄膜的粗糙表面，压电常数d_潜在地较低，约为-20 pC/N。极化被证明是提高压电常数的有效方法，其约为-65pC/N。为了在金刚石悬臂梁上制作压电传感器和驱动器的结构，在不损伤金刚石悬臂梁层的情况下，利用Si（OH）2等离子体刻蚀技术，以Pt为掩膜层，成功地对PZT薄膜进行了图形化。利用我们开发的PZT薄膜的制备和图案化技术，我们实现了一个金刚石原子力显微镜探针与PZT传感器和驱动器。在8V电压下，传感分辨率为0.4nm，驱动力为12 μN。少

We have developed a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators. In order to realize this system, first, we have studied on a variety of micromachining techniques of diamond thin films. Then, we have developed a batch fabrication process for diamond AFM probes. The diamond probes were fabricated by selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip together with the anodic bonding technique of a glass backing plate to a diamond base, to which the diamond probes have been attached, to facilitate handling. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.In addition, we fabricated lead zirconate titanate (PZT) thin film on a d … More iamond thin film substrate and examined its piezoelectric properties. We applied the rapid thermal annealing in a N_2 ambient for PZT thin film sputtered at room temperature on a diamond thin film substrate. Under conditions of a temperature ramp rate of 10℃/s and an annealing temperature of 700℃, deposited PZT thin film showed a phase transformation to a perovskite structure. However, piezoelectric constant d_<31> was potentially low, about -20 pC/N, due to rough surface of the diamond thin film. Poling was proved to be an effective process to improve a piezoelectric constant, that being about -65 pC/N. In order to fabricate the structure of a piezoelectric sensor and actuator on a diamond cantilever, PZT thin film was also successfully patterned by RIE in SF_6 plasma using a Pt mask layer to be used as an upper electrode without damaging the diamond cantilever layer. Using our developed fabrication and patterning techniques of PZT thin film, we realized a diamond AFM probe with a PZT sensor and actuator. A sensing resolution of 0.4 nm and an actuation force of 12 μN at an applied voltage of 8 V were obtained. Less