Study on high density disk data storage using atomic force micorscopy

随着多媒体技术的发展，海量信息的存储变得越来越重要，因此开发高密度的数据存储器势在必行。传统的光学数据存储器的存储密度受到凹坑尺寸的限制，凹坑尺寸等于激光波长的一小部分。另一方面，新发明的扫描探针显微镜的分辨率不受光波长的限制，而是取决于探针的尖端半径或探针顶部的一个原子。因此，获得了非常规的高分辨率。此外，纳米尺度的凹坑可以通过施加电压或负载到probes.In这项研究中，有利地利用扫描探针显微镜的高分辨率，特别是利用静电力的扫描静电显微镜，一种技术，以非常高的密度存储数据，通过产生纳米尺度的凹坑进行了研究。为了提高探针显微镜的响应速度，有效地利用了静电力，设计了具有高谐振频率的微机械探针。在记录方法中，提出并论证了一种利用半导体探针的电荷存储和记录新技术，即用电容变化来监测半导体针尖的凹陷。采用硅微加工技术研制了一种用于高速数据存储的新型扭转谐振式探头。

It is indespensable to develope a high density data storage since the recording of the huge information becomes important according to the progress of multimedia. The memory density of the conventional optical deta storage is limitted by the pit size which is equal to a fraction of the laser light wavelength. On the other hand, the resolution of the newly invented scanning probe microscopy is not limitted by the light wavelenght, but is dependent on the tip radius of the probe or one atom on the top of the probe. And thus, unconventionally high resolution is obtained. In addition, nanometer scale pit can be generated by the application of voltage or load to the probe.In this study, advantageously using the high resolution of the scanning probe microscopy, especially the scanning electrostatic microscopy utilizing electrostatic force, a technique to store data at very high density by generating nanometer scale pits is studied. To improve the response of the probe microscopy, the elecrostatic force is effectively used and the micromachined probe having a high resonant frequency is desined. In the recording method, a new charge strage and reding technique using semiconductor probe, in which the depression of the semiconductor tip is monitored by the chapacitance change, is proposed and demonstareted. A new tortional resonator type probe has been fabricated for high speed data starage by silicon micormachining techinique.