Development of Micro Handling Mini Robot

在本研究中，我们开发了一个微型搬运机器人。这具有旋转三自由度的球形超声波电机和夹层式超声波电机。球形超声波电机由一个玻璃制成的半球形转子和三个环形定子组成。我们在半球形转子的中心放置反射镜并测量其姿态，通过PSD装置检测反射镜反射的激光。定子背面叠层有两相压电陶瓷，通过对每个压电陶瓷施加交变电压，改变相位差和频率，可以使转子绕任意轴旋转。在精确定位的情况下，我们控制在定子表面产生的弹性波的数量。该电机具有1/1000度的定位精度和在3度的移动范围内在3毫秒内稳定的能力。此外，我们增加了三明治型超声波电机连接到连接到半球形转子。由于该电机具有两个定子，转子盘夹在它们之间，输出扭矩是在一个定子的情况下的两倍高。这种微型机器人具有良好的定位精度和调整时间的生物技术和医疗应用的特点。

We have developed a micro handling robot in this research. This has a spherical ultrasonic motor with rotational three degree of freedom and a sandwich type of ultrasonic motor. The spherical ultrasonic motor consists of a semispherical rotor made of glass and three ring type stators. We set mirrors in the center of the semispherical rotor and measure the posture, detecting the reflected laser light from them by a PSD devices. The stator has two phases piezoelectric ceramics laminated at the back of it. We can rotate the rotor about arbitrary axis by applying alternating voltages to each ceramics and changing the phase difference and the frequency. In the case of precise positioning, we control the number of elastic wave generated on the surface of the stator. The motor has capability of positioning in the accuracy of 1/1000 degrees and settling in three milli seconds in the movable range of three degrees. Furthermore, we added the sandwich type ultrasonic motor to the link attached to the semi-spherical rotor. Since this motor has two stators holding rotor disk between them, the output torque is twice as high as in the case of one stator.This micro robot has excellent features of positioning accuracy and settling time for biotechnological and medical applications.