Acquisition of an Electron Beam Nanolithography System

获得电子束纳米光刻系统

• 批准号: 0116423
• 负责人: Marvin White
• 金额: $ 36万
• 依托单位: Lehigh University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-09-01 至 2005-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0116423&HistoricalAwards=false
• 关键词: Acquisition; Electron; Beam; Nanolithography; System

This MRI Proposal involves the procurement of an Ultra-High Resolution Electron Beam (E-Beam) Nanolithography and Metrology System for research and education programs at Lehigh University. The E-Beam system offers a unique capability to university, industry and government researchers to fabricate novel device structures and to characterize the nanometric features of materials. This E-B earn system will provide an opportunity for researchers to realize nanolithographic features for the fabrication of mesoscopic and quantum devices, such as quantum-dot nonvolatile semiconductor memories, single electron transistors, biosensors, and nanoscopic-instrumented, microelectromechanical systems (MEMS). In addition, the E-Beam system will provide exceptional educational instruction into nanotechnology. The fabrication of devices requires the integration of processes where literally several hundred operations are needed to realize a final device structure. In order to accomplish this seamless integration of processes an E-Beam Nanolithograpy and Metrology System must be located literally within the same physical infrastructure. For example, the close coupling of nanoelectronics devices and MEMS with the preparation of biological samples is essential to accomplish tasks such as cell characterization and electronic sequencing of DNA. Finally, the E-Beam system will serve the surrounding community within the Lehigh Valley particularly the local colleges and K-12 students to excite students into the emerging world of nanotechnology.

该 MRI 提案涉及为里哈伊大学的研究和教育项目采购超高分辨率电子束 (E-Beam) 纳米光刻和计量系统。电子束系统为大学、工业界和政府研究人员提供了独特的能力，可以制造新颖的器件结构并表征材料的纳米特征。该E-B Earn系统将为研究人员提供一个机会，实现用于制造介观和量子器件的纳米光刻特征，例如量子点非易失性半导体存储器、单电子晶体管、生物传感器和纳米仪器化微机电系统（MEMS）。此外，电子束系统还将提供纳米技术方面的特殊教育指导。器件的制造需要集成工艺，实际上需要数百次操作才能实现最终的器件结构。为了实现这种工艺的无缝集成，电子束纳米光刻和计量系统必须真正位于同一物理基础设施内。例如，纳米电子器件和 MEMS 与生物样品制备的紧密结合对于完成细胞表征和 DNA 电子测序等任务至关重要。最后，电子束系统将为利哈伊谷周边社区，特别是当地大学和 K-12 学生提供服务，激发学生进入纳米技术的新兴世界。