Preparation of High Purity Nitrides

点击翻译按钮获取中文摘要

AlN ceramics have a high thermal conductivity and low thermal expansion. There are so many applications to structural materials as LSI substrates. The purpose of this work is to establish preparation procedures of AlN fine powder with high purity by direct nitridation of aluminum metal. The nitridation of Al-powder was conducted under a stream of nitrogen. Relatively rapid nitridation reaction began at temperature range of 850^ﾟC to 1200^ﾟC. The powders prepared at 900^ﾟC for 2 hours were identified as AlN with a small amounts of residual metallic Al by powder X-ray analysis. Nitridation of aluminum by an addition of 30wt% AlN powder was very useful for the production of well dispersed powders without aggregation. AlN fine powders showing with color were obtained by re-nitridation at 1600 ^ﾟC of the powder prepared at 900 ^ﾟC for 2 hours. Two stage niidation of aluminum with AlN powders is very advantageous method for the preparation of fine powder with high sintering properties.