Optical mask aligner and plasma cleaner for core nano-fabrication facility

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This proposal seeks to acquire tools which will be added to a core nanofabrication facility at the University of Ottawa. This facility is accessed by several internal and external users to fabricate nanostructures of interest in photonics, microfluidics, MEMS (microelectromechanical systems) and electronics for applications across varied fields such as biomedical engineering, biophysics, alternative energy, and information and communications technologies. This is the only non-captive accessible nanofabrication facility in Eastern Ontario - its user base, which consists mostly of students and post-doctoral fellows, spans the region, reaching into Montreal. Researchers from several departments within the University of Ottawa, from Carleton and McGill Universities, and from the National Research Council depend on this facility for critical aspects of their work. The facility also supports several international research projects and university-industry research partnerships.