Optical mask aligner and plasma cleaner for core nano-fabrication facility

用于核心纳米制造设施的光学掩模对准器和等离子清洁器

• 批准号: 458616-2014
• 负责人: Berini, Pierre
• 金额: $ 10.19万
• 依托单位: University of Ottawa
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2013
• 资助国家: 加拿大
• 起止时间: 2013-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=541985
• 关键词: Optical; mask; aligner; plasma; cleaner

This proposal seeks to acquire tools which will be added to a core nanofabrication facility at the University of Ottawa. This facility is accessed by several internal and external users to fabricate nanostructures of interest in photonics, microfluidics, MEMS (microelectromechanical systems) and electronics for applications across varied fields such as biomedical engineering, biophysics, alternative energy, and information and communications technologies. This is the only non-captive accessible nanofabrication facility in Eastern Ontario - its user base, which consists mostly of students and post-doctoral fellows, spans the region, reaching into Montreal. Researchers from several departments within the University of Ottawa, from Carleton and McGill Universities, and from the National Research Council depend on this facility for critical aspects of their work. The facility also supports several international research projects and university-industry research partnerships.

该提案旨在获得将添加到渥太华大学核心纳米纤维设施的工具。该设施由几个内部和外部用户访问，以制造光子学，微流体，MEMS（微机电系统）和电子学中感兴趣的纳米结构，用于不同领域的应用，如生物医学工程，生物物理学，替代能源以及信息和通信技术。这是安大略东部唯一一个非圈养可访问的纳米工厂-其用户群主要由学生和博士后研究员组成，跨越该地区，延伸到蒙特利尔。来自渥太华大学，卡尔顿大学和麦吉尔大学以及国家研究理事会的几个部门的研究人员依赖于他们工作的关键方面的这个设施。该设施还支持几个国际研究项目和大学-工业研究伙伴关系。