SGER: A VLSI-Like Design Methodology for Nanoelectromechanical Systems

该项目旨在为纳米机电系统（NEMS）开发类似vlsi的设计方法。具体而言，计算机辅助设计（CAD）工具正在开发用于纳米机电设备的功能和紧凑建模。不像宏观和一些微观设备，连续物理原理是有效的，在纳米尺度上，重要的是要考虑到设备的颗粒性质。一种结合最低层次原子方法和最高层次连续体理论的多尺度方法正在被开发用于NEMS的功能建模。正在研究紧凑模型的发展，以便设计大型互连的NEM设备阵列。最后，基于碳纳米管的NEMS正在被研究作为纳米级传感器、执行器、设备和系统的基本构建块。

This project is aimed at developing a VLSI-like design methodology for Nano-electro-mechanical Systems (NEMS). Specifically, computer-aided design (CAD) tools are being developed for functional and compact modeling of nano-electro-mechanical devices. Unlike macroscopic and some microscopic devices, where continuum physical principles are valid, at nanoscales it is important to account for granular nature of the devices. A multiscale approach combining the lowest level atomistic approaches to the highest-level continuum theories are being developed for functional modeling of NEMS. The development of compact models is being investigated to enable design of large and interconnected-array of NEM devices. Finally, carbon nanotube based NEMS are being investigated as basic building blocks for nanoscale sensors, actuators, devices and systems.