On-Chip 3D Spiral Inductors by Self-rolled-up Membranes: Extreme Miniaturization and Performance Enhancement

该计划的目标是建立一个平台，处理像2D和功能像3D。具体而言，作为PI的CAREER赠款的直接结果而开发的应变诱导自卷起管状膜纳米技术将用于3D螺旋电感器，其占地面积大大减少，电气性能增强。智力的优点是发光的应变能释放机制与瞬态边界条件和局部应力控制;并探讨磁场约束和磁能存储能力的3D架构，涉及金属-绝缘体混合分层材料和几何形状。通过2D处理产生3D架构的独特方法是变革性的，因为它从根本上改变了增加电感和减少衬底相关寄生效应之间的冲突要求;更广泛的影响是帮助建立一个平台技术，用于使用异构集成3D架构的广泛应用，包括引导生物细胞生长、谐振器、等离子体波导、超材料和在前所未有的频率范围内操作的传感器。将建立一个关于卷起式电感器的教育单元，并将其纳入为大学生开设的高级纳米技术新实验课程的教学大纲，并专门为高中示范设计。该计划的跨学科性质将为PI创造一个更具包容性和动态的指导环境提供机会。

The objective of this program is to establish a platform that processes like 2D and functions like 3D. Specifically, the strain-induced self-rolled-up tubular membrane nanotechnology, developed as a direct result of the PI's CAREER grant, will be exploited for 3D spiral inductors with dramatically reduced footprint and enhanced electrical performance. The intellectual merit is to shine light on the strain energy releasing mechanism with transient boundary conditions and localized stress control; and explore magnetic field confinement and magnetic energy storage ability in 3D architectures involving metal-insulator hybrid hierarchical materials and geometries. The unique approach of producing 3D architectures through 2D processing is transformative because it changes fundamentally the conflicting requirement between increasing inductance and reducing substrate related parasitic effect; and by passes mechanical stability issues associated with processing on 3D structures.The broader impacts are to help establishing a platform technology for a wide range of applications using heterogeneously integrated 3D architectures, including guiding biological cell growth, resonators, plasmonic waveguide, metamaterials, and sensors operating in unprecedented frequency range. An education module on rolling-up inductors will be established and incorporated in the syllabus of a new experimental course on advanced nanotechnology for undergraduate students and tailored for high school demonstration. The interdisciplinary nature of this program will provide opportunities for the PI to create a more inclusive and dynamic environment for mentoring.