Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure INTACT - Design and System Integration of Microactuators with Discrete and Thin-Film MSM Elements

这个子项目是一个一揽子计划的一部分，该计划的目标是开发利用磁形状记忆（MSM）合金中磁感应长度变化的微致动器。这些材料的长度变化可达10%，为在薄膜技术中创造紧凑型微致动器提供了机会，特别是如果应用了msmthin薄膜。所从事的任务是混合集成MSM微致动器的设计和建模，以及用于产生磁通量的微线圈和永磁体以及用于引导磁通量的软磁微结构等励磁元件的制造技术的研究和开发工作。此外，混合薄膜微致动器，即使用离散MSM元件的微致动器，将被制造并进行评估。这项活动的目的是在尚未获得MSM薄膜的情况下，已经获得MSM微致动器的经验。

This sub-project is part of a package proposal that has the objective to develop microactuators utilizing the magnetically induced change of length in magnetic shape memory(MSM) alloys. These materials achieve a length change of up to 10%, opening up anopportunity for creating compact micro actuators in thin-film technology, particularly if MSMthin-films are applied. Tasks pursued are the design as well as the modeling of hybrid andintegrated MSM micro actuators and research and development work on technologies forfabricating excitation components, like microcoils and permanent magnets for magnetic fluxgeneration and soft magnetic microstructures for guiding the flux. Furthermore, the hybridthin-film micro actuator, i.e. the one utilizing discrete MSM elements, will be fabricated andsubjected to an evaluation. This activity is aimed at already gaining experience with MSMmicro actuators while MSM thin-films are not yet available.