Application of microplasma to materials device process

基于微等离子体独特的局部性和高密度等特点，各种新的应用技术的开发正在进行中。包括新材料加工、生物材料处理、化学分析、超短波长光源等。在我们团队中，为了建立微等离子体材料器件加工，我们进行了以下研究：(A)开发使用超临界流体(SCF)等离子体的高速材料器件加工：我们开发了超临界流体等离子体器件，并诊断了等离子体的性质。并将其应用于碳膜和铜膜的沉积。这些成果使得非平衡态高密度、高合成的碳纳米材料的制备接近临界点。(B)利用各种微等离子体合成新材料：我们开发了各种类型的微等离子体，如大气和在液体等离子体装置中。进行血浆诊断，观察超不平衡状态。集成等离子体材料加工设备(等离子体芯片和等离子体面板)的研制：我们开发了等离子体芯片和等离子体面板等集成等离子体材料加工设备，并对其等离子体性能进行了诊断。

Based on the unique characteristics of microplasmas, such as an extraordinary locality and high density, development of various new application technologies are in progress. These include, e.g., novel materials processing, biomaterials treatment, chemical analysis, light sources of ultra-short wavelengths.In our group, in order to establish microplasma materials device processing, these studies have been performed as follows:(A) Development of high-rate materials device processing with using supercritical fluid (SCF) plasma: We developed supercritical fluid plasma devices and diagnosed the plasma properties. Applications of it to deposition of carbon and copper thin films were performed. These achievements make the non-equilibrium with high density and high-synthesis preparation of carbon nano-materials near the critical point.(B) Synthesis of novel materials by various microplasmas: We developed various types of microplasmas, such as atmospheric and in liquid plasma devices. Plasma diagnoses were performed to observe the super-non-equilibrium. Novel carbon-nano-materials were also found.(C) Fabrication of integrated plasma materials processing devices (plasma chip and plasma panel): We developed integrated plasma materials processing devices such as plasma chip and plasma panel, and diagnosed their plasma properties.