Multi-Magnetron Sputter Deposition System for the Synthesis of Nanocomposite Thin Films/Surface Coatings

薄膜、涂层和其他表面层在包括微纳机电系统(MEMS/NEMS)在内的各种应用中被用于各种功能、装饰和保护目的。除了萨斯喀彻温大学现有的沉积系统外，新型纳米结构涂层的合成还需要适当的沉积系统。一种基本的沉积系统，即多磁控溅射沉积系统，在本提案中被要求用于合成纳米复合涂层，这是该大学或该区域其他地方尚未提供的。它是纳米工程材料实验室的关键基础设施，对校园内其他十多个相关研究项目做出新的研究贡献非常重要。人们普遍认为，具有可控纳米结构的纳米薄膜/涂层的合成对于开发具有更好的表面性能的新型功能材料以满足纳米科学和纳米技术的快速发展的需求至关重要。由于萨斯喀彻温省大学或该省其他地方没有类似的设备，拟议中的设备的收购将对萨斯喀彻温省处于材料科学前沿的萨斯喀彻温省大学现有的与薄膜、涂层、MEMS/NEMS和其他表面层相关的研究项目产生重大积极影响。该系统将用于在可控条件下在各种衬底材料上制备纳米复合薄膜/涂层，并帮助研究人员在开发各种工业和生物医学应用的表面性能得到极大改善的新型功能纳米材料方面做出极具原创性的贡献。它还将为高素质的受训人员提供极好的机会，获得纳米科学和纳米技术方面的实际经验和专业知识。

Thin films, coatings, and other surface layers are used for a variety of functional, decorative, and protective purpose in a myriad of applications including micro- and nano- electromechanical system (MEMS/NEMS). The synthesis of the novel nanostructured coatings requires appropriate deposition systems in addition to the existing ones at the University of Saskatchewan. One essential deposition system, a muliti-magnetron sputter Deposition System, which is not yet available at the University or elsewhere in the region, is requested in this proposal for the sysnthesis of nanocomposite composite coatings. It is the key infrastructure for the Nano-Engineering Materials Laboratory and very important for more than ten other related research programs on campus to make novel research contributions. It is well accepted that the synthesis of nanostructured thin films/coatings with controlled nanostructures is of paramount importance for the development of novel functional materials with much improved surface properties to meet the demand of rapid development of nanoscience and nanotechnology. Since there is no similar equipment existing in the University of Saskatchewan or elsewhere in the province, the acquisition of the proposed equipment will have significant positive impact on the existing research programs related to thin films, coatings, MEMS/NEMS and other surface layers at the University of Saskatchewan, which is at the forefront of material science. The requesed system will be used to fabricate nanocomposite thin films/coatings on various substrate materials under controlled conditions and help researchers make highly original contributions in the development of novel functional nanomaterials with much improved surface properties for various industrial and biomedical applications. It will also provide excellent opportunities for highly qualified trainees to gain practical experience and expertise in nanoscience and nanotechnology.