A System for Optical Characterization of Complex MEMS

我的研究小组研究微机电系统（MEMS），以开发微型传感器和执行器。我们在静电MEMS的动力学、振动和控制方面处于国际领先地位。在过去十年中，我们在这一领域取得的一些成就是：(i)开发基于分岔的气体传感器。我们还率先将其用作二进制气体传感器，通过二进制（0/1）输出检测气体浓度是否超过阈值，从而消除了对读出电子设备的需求。（ii）大信号传感器，通过开发与多值响应相结合的检测方法，将动态范围扩展到传统的功率处理能力限制之外。（iii）可变形微镜，消除了对独立执行器的需求，降低了执行器的复杂性。静电原子力显微镜（AFM）。我们展示了全电动原子力显微镜，由pcb和现成的探针制成，成本只有几百美元。（iii）在MEMS[4]中透明地（独立地）结合静电和电磁驱动的方法。我们利用静电和电磁驱动的独立性来开发新型可调谐磁场强度传感器。（iv） MEMS长行程驱动器和微镜的闭环控制。(5)静电MEMS致动器的冲击动力学。我们最近报告发现了一类新的间歇性和拉入不稳定性。我们将使用所要求的系统来设计、测试和表征MEMS: -惯性传感器：陀螺仪，磁场传感器，气体传感器和化学传感器-致动器：可变形微镜，光栅微镜和微镊子。这将使我们能够在空气和水介质中进行测试，以及封装在真空封装中。传感器和执行器将由电驱动，并使用测振仪进行检测。典型的测试装置由一个用于驱动信号产生的信号发生器、一个信号放大器、一个真空或水试验箱（必要时）和一个用于宽频域模态分析的测振仪组成。前一个项目在我的实验室有，后一个项目是在这个提议下要求的。

My research group studies Micro-Electro-Mechanical Systems (MEMS) to develop micro sensors and actuators. We are one of the leading groups internationally in the dynamics, vibrations, and control of electrostatic MEMS. Some of our achievements in this field over the last decade are: (i)Developing bifurcation-based gas sensors. We also pioneered their use as binary gas sensors that detect whether a gas concentration exceeds a threshold value or not via binary (0/1) output, thereby eliminating the need for readout electronics. (ii)Large signal sensors that expand the dynamic range beyond the traditional limits of power handling capacity by developing detection methods that coup with multivalued responses. (iii)Deformable micromirrors that eliminate the need for independent actuators and reduce actuation complexity. (ii) Electrostatic Atomic Force Microscopes (AFM). We demonstrated all-electric AFMs built out of PCBs and off-shelf probes at a cost of few hundred dollars. (iii) Methods to transparently (independently) combine electrostatic and electromagnetic actuation in MEMS [4]. We exploited the independence of electrostatic and electromagnetic actuation to develop novel tunable magnetic field strength sensors. (iv) Close-loop control of MEMS long-stroke actuators and a micromirrors. (v) Impact dynamics of electrostatic MEMS actuators. We recently reported the discovery of a new classes of intermittencies and pull-in instabilities. We will use the requested system to design, test, and characterize MEMS: - inertial sensors: gyroscopes, magnetic field sensors, gas sensors, and chemical sensors - actuators: deformable micromirrors, grating micromirrors, and micro tweezers It will allow us to test them in air and aqueous media as well as encapsulated in vacuum packaging. The sensors and actuators will be actuated electrically and sensed using the vibrometer. The typical test setup is made of a Signal Generator for drive signal generation, a signal amplifier, a vacuum or water test chamber where needed, and a Vibrometer for wide frequency-domain modal analysis. The former items are available in my laboratory and the latter item is being requested under this proposal.