Nanowire-Based High-Frequency, High-Q Electromechanical Resonators

摘要：本研究的目标是开发高频、高品质因数(Q)的纳米机电谐振器和集成的谐振器/传感器系统。方法是在生长后或通过受控的直接生长方法，使用化学合成的纳米线来构建弯曲模式机电谐振器。纳米线谐振器系统由于其尺寸小、单晶材料结构、表面光滑和大纵横比，既提供了GHz工作潜力，又降低了内部和夹持损耗。智能优势：通过精心设计的材料研究、器件制造和分析，将采取系统的方法来提高品质因数和共振频率。将通过选择性生长纳米线桥来探索纳米线谐振器与其他芯片上组件的集成。通过耦合GHz谐振器和电子换能器，将尝试进行量子限制位置测量。高频、高Q系统将适用于一些应用，包括超灵敏的质量、力和位置检测，并开辟新的前沿，如机械量子态和机械/电气自由度的纠缠。更广泛的影响：该计划将在任何一年为至少一名毕业生和一名本科生提供教育和培训机会，重点是从代表性不足的群体中招收学生。在研究过程中开发的知识和技术将被纳入一个新的、全面的本科课程，并通过出版物、技术转让、网站和教科书向公众传播。市中心、高需求学区的学生也将通过教学计划、高中班级访问和在线展览的研究体验参与进来。

ABSTRACT:The objective of this research is to develop high-frequency, high-quality factor (Q) nano-electromechanical resonators and integrated resonator/sensor systems. The approach is to build flexural-mode electromechanical resonators using chemically synthesized nanowires, either after growth or through a controlled direct-growth method. The nanowire resonator system offers both GHz operation potential and reduced internal and clamping losses due to its small size, single-crystalline material structure, smooth surfaces and a large aspect ratio.Intellectual Merits: A systematic approach to improve the quality factor and the resonance frequency will be carried out through carefully designed material studies, device fabrication and analysis. Integration of nanowire resonators with other on-chip components will be explored through selective growth of nanowire bridges. Quantum-limited position measurements will be attempted by coupling a GHz resonator with an electrical transducer. The high-frequency, high-Q system will be suitable for a number of applications including ultra-sensitive mass, force and position detection, and open new frontiers such as mechanical quantum states and entanglement of the mechanical/electrical degrees of freedom. Broader Impacts: This program will provide educational and training opportunities for at least one graduate and one undergraduate student at any given year, with an emphasis on recruiting students from underrepresented groups. Knowledge and techniques developed during research will be incorporated into a new, comprehensive undergraduate course and disseminated to the general public through publications, technology transfer, websites and a textbook. Students in inner-city, high-need school districts will also be engaged through a research experience for teaches program, high-school class visits and online exhibits.