Nanowire-Based High-Frequency, High-Q Electromechanical Resonators

摘要：本研究的目的是开发高频、高品质因数(Q)纳米机电谐振器和谐振器/传感器集成系统。该方法是使用化学合成的纳米线来构建弯曲模机电谐振器，无论是经过生长还是通过受控的直接生长方法。由于其小尺寸、单晶材料结构、光滑表面和大宽高比，纳米线谐振器系统提供了GHz的工作电位，并减少了内部和箝位损耗。智力优势：通过精心设计的材料研究、器件制造和分析，将采用系统的方法来提高质量因子和共振频率。通过纳米线桥的选择性生长，将探索纳米线谐振器与其他片上元件的集成。量子有限的位置测量将尝试通过耦合一个GHz谐振器与一个电子换能器。高频，高q系统将适用于许多应用，包括超灵敏的质量，力和位置检测，并开辟新的领域，如机械量子态和机械/电气自由度的纠缠。更广泛的影响：该项目将在任何一年为至少一名研究生和一名本科生提供教育和培训机会，重点是从代表性不足的群体中招收学生。在研究期间发展的知识和技术将纳入新的综合性本科课程，并通过出版物、技术转让、网站和教科书向一般公众传播。市中心高需求学区的学生也将参与教学项目的研究体验、高中课堂参观和在线展览。

ABSTRACT:The objective of this research is to develop high-frequency, high-quality factor (Q) nano-electromechanical resonators and integrated resonator/sensor systems. The approach is to build flexural-mode electromechanical resonators using chemically synthesized nanowires, either after growth or through a controlled direct-growth method. The nanowire resonator system offers both GHz operation potential and reduced internal and clamping losses due to its small size, single-crystalline material structure, smooth surfaces and a large aspect ratio.Intellectual Merits: A systematic approach to improve the quality factor and the resonance frequency will be carried out through carefully designed material studies, device fabrication and analysis. Integration of nanowire resonators with other on-chip components will be explored through selective growth of nanowire bridges. Quantum-limited position measurements will be attempted by coupling a GHz resonator with an electrical transducer. The high-frequency, high-Q system will be suitable for a number of applications including ultra-sensitive mass, force and position detection, and open new frontiers such as mechanical quantum states and entanglement of the mechanical/electrical degrees of freedom. Broader Impacts: This program will provide educational and training opportunities for at least one graduate and one undergraduate student at any given year, with an emphasis on recruiting students from underrepresented groups. Knowledge and techniques developed during research will be incorporated into a new, comprehensive undergraduate course and disseminated to the general public through publications, technology transfer, websites and a textbook. Students in inner-city, high-need school districts will also be engaged through a research experience for teaches program, high-school class visits and online exhibits.