CAREER: InP-based Micro-electro-mechanical Systems (MEMS) for Optical Microsystems

能够实现波分复用（WDM）交换，同时避免影响传输速度的光-电子-光互连的下一代光通信器件的需求很大。像磷化铟（InP）这样的化合物半导体具有直接带隙，可以实现像激光器和光放大器这样的有源光学器件——这是硅的一个优势，硅是一种主要局限于电子器件的间接带隙材料。基于inp的有源光电子器件与微机电系统（MEMS）执行器的单片集成将实现通用WDM无损开关、可调谐激光器和1.55 mm可调谐光学滤波器。在这个波长，光纤的损耗最小。该CAREER奖通过将MEMS、光电子学和集成光学微系统III-V材料的微加工三个技术领域相结合，支持跨学科研究和教育计划。该研究组件旨在通过降低芯片上的光损耗，从而实现复杂器件，从而证明在MEMS和光学结构的单片集成中使用基于inp的材料的优势。该计划最初的重点是研究InP的机电行为，以开发静电驱动的线性微致动器。这项研究的结果将使基于inp的材料能够(1)通过结合MEMS线性微致动器和光波导来开发创新的4x4光交叉连接开关；(2)将光交叉连接开关与半导体光放大器（soa）集成，以最大限度地减少微系统中的光损耗。教育部分侧重于以研究为导向的课程，将精心制定的研究问题整合到MEMS和微系统的本科和研究生水平的教学中，并让学生在课堂和实验室中获得实践经验，工业实践和团队合作。通过为本科生和研究生在合作研究项目上提供直接互动的途径，使学生早期接触到互动研究环境。

There is a great demand for next-generation optical communication devices that are capable of wavelength-division multiplexed (WDM) switching while avoiding optical-electronic-optical interconnects which compromise transmission speed. Compound semiconductors such as Indium Phosphide (InP) have direct bandgaps that allow active optical devices like lasers and optical amplifiers to be realized - an advantage over silicon, an indirect bandgap material limited primarily to electronic devices. The monolithic integration of InP-based active optoelectronics with micro-electro-mechanical systems (MEMS) actuators will enable the realization of versatile WDM lossless switches, tunable lasers and tunable optical filters at 1.55 mm. At this wavelength optical fibers have minimal losses. This CAREER award supports an interdisciplinary research and education program by combining the three technical areas of MEMS, optoelectronics, and microfabrication of III-V materials for integrated optical microsystems. The research component aims to demonstrate the advantages of using InP-based materials in monolithic integration of MEMS and optical structures by reducing the optical losses on the chip, thus making complex devices achievable. The initial focus of this program is to investigate the electro-mechanical behavior of InP for development of electrostatically driven linear microactuators. The results of this study will enable the use of InP-based materials for (1) development of an innovative 4x4 optical cross-connect switch by combining the MEMS linear microactuators and optical waveguides and (2) integration of the optical cross-connect switch with semiconductor optical amplifiers (SOAs) to minimize optical losses in the microsystem. The educational component focuses on a research oriented curriculum by integrating well-formulated research problems in teaching undergraduate and graduate level courses in MEMS and Microsystems and by exposing students to hands-on experience, industrial practice, and teamwork in both classrooms and laboratories. An early exposure of students to interactive research environments is accomplished by providing avenues for direct interaction between undergraduate and graduate students on collaborative research projects.