Bipolar/CMOS Device Toolbox and Fabrication Process for a Freshman Course in Solid State Devices

加州理工学院固态器件和集成电路新生课程正在开发新的器件模拟和布局工具以及新的器件制造工艺，该课程每年向大约90个专业和非专业学生提供四分之一的课程。这门课的不同寻常的目标是激发新生对固态电子学的兴趣，特别是对工程学的兴趣。因此，基本的课程策略是适当地将设备物理简化到直觉和简单数学的水平，并尽可能简化制造过程，以便使第一个本科生的实验体验非常积极。为此，设计了一个用于器件仿真和布局的软件工具箱，使新生能够更直观地了解器件的操作，避免器件和电路布局中的设计错误。以使用自旋掺杂剂为中心的新制造工艺将允许更容易、更可靠和更安全地使用n型和p型掺杂剂。器件模拟和布局工具以及这两种掺杂剂类型的使用将使本课程能够扩展到双极型和CMOS型器件的设计和制造，同时保留对工艺至关重要的简单性。这将是微电子器件设计和制造本科课程教学的重大进步。

New device simulation and layout tools and a new device fabrication process are being developed for the Caltech freshman course in solid state devices and integrated circuits, a two-quarter sequence offered annually to approximately 90 majors and non-majors. The unusual goal of this class is to excite interest among freshman in solid state electronics in particular, and engineering in general. Hence the underlying curricular strategy is to appropriately simplify device physics to the level of intuition and simple mathematics, and to simplify the fabrication process as much as possible so as to make the first undergraduate laboratory experience very positive. To this end, design of a software toolbox for device simulation and layout enables freshmen to better understand device operation at an intuitive level and to avoid design mistakes in device and circuit layout. A new fabrication process centered around the use of spin-dopants will allow use of both n-type and p-type dopants with greater ease, reliability and safety. Device simulation and layout tools and the use of both dopant types will enable the present curriculum to be expanded to the design and fabrication of bipolar and CMOS devices while retaining the simplicity crucial for the process. This will be a significant advance in the teaching of undergraduate courses in the design and fabrication of microelectronic devices.