Ultra Sensing Using Highly Precise Micromachining

利用基于半导体微加工的微加工技术制造的微结构可以快速移动。微加工技术使高灵敏度、快速响应的传感器成为可能。我们可以分别通过集成多路复用电路和电容检测电路来制造传感器阵列和电容传感器。此外，通过集成执行器可以制造出高灵敏度的谐振传感器、伺服传感器和自诊断传感器。超传感技术是通过精密微加工、不同部件集成和纳米加工技术发展起来的，具有比传统传感技术更高的性能。真空封装传感器如电容式膜片真空传感器和采用静电悬浮微电机的旋转陀螺仪已得到发展。后一种陀螺仪转速可达10000转/分，可用作两轴角速度传感器和三轴加速度计。近场光学显微镜具有一个小的（直径20纳米），在一个薄硅悬臂梁的末端有更多的温度，实现了高吞吐量，因此可以应用于光学数据存储。本文研制了一种多微探针数据存储装置，该装置在探针端部装有30 nm的小加热器。阵列（32×32）证明需要与集成电路互连，为此开发了耐热玻璃中的电馈通。成功地对用于DVD RAM的相变记录介质（GeSbTe）进行了热记录，并利用电导变化进行了电读取。在硅探针末端选择性沉积碳纳米管，并将其应用于扫描探针显微镜。研究了极薄（60 nm）硅悬臂梁的谐振特性，通过在超高真空中加热并去除表面天然氧化物，获得了高达25万的质量因子(Q)。这种薄的高Q谐振器适用于高灵敏度的谐振传感器。微机械偏振调制器是为实现红外反射光谱的高灵敏度而研制的

Micro structures, which are fabricated using micromachining based on a semiconductor micro fabrication, can move quickly. The micromachining technology makes highly sensitive and quick response sensors feasible. We can fabricate sensor array or capacitive sensors by integrating multiplexer circuits or capacitance detecting circuits respectively. Moreover highly sensitive resonating sensors, servo sensors and self-diagnostic sensors can be made by integrating actuators. Ultra sensing which has higher performancess than conventional sensing technologies has been developed by precise micromachining, integration of different components and nanomachining.Vacuum packaged sensors as capacitive diaphragm vacuum sensors and rotating gyroscopes using electrostatically levitating micro motor have been developed. The latter gyroscope could rotate at 10000 rpm and be used as two axis angular rate sensor and three axis accelerometer.Near field optical microscope which have a small (20 nm diameter) a … More perture at the end of a thin silicon cantilever achieved a high throughput and hence can be applied for optical data storage. Multi microprobe data storage devise which has arrayed thermal prove with small (30 nm) heater at the tip has been developed. The arrayed (32×32) prove needs interconnection to the integrated circuit and for this purpose electrical feedthrough in a Pyrex glass was developed. Thermal recording to a phase change recording media (GeSbTe) which is used for DVD RAM and electrical reading using conductance change were successfully performed.Carbon nanotube was deposited selectively at the end of silicon probe and applied for the SPM (Scanning Probe Microscope). Resonating characteristics of extremely thin (60 nm) silicon cantilevers has been studied High quality factor (Q) up to 250000 was achieved by heating in ultra high vacuum and removing surface natural oxide. This thin high Q resonator is effective for highly sensitive resonating sensors. Micromachined polarization modulators have been developed for the purpose of highly sensitive infrared reflection spectroscopy Less