Capacitive and ohmic microelectromechanical switches with bridges made of spring stell, especially for application in high frequency systems

这项建议的科学计划包括设计、开发、优化和表征静电激活的电容式和欧姆式微电子机械开关(MEMS开关)，使用弹簧钢作为开关的桥架。这些桥梁将通过溅射弹簧钢以整体方式制造，并以混合方式通过将预先构造的弹簧钢箔粘合到基材上来制造。对于这两种方法，电容式和欧姆式MEMS桥将通过应用额外的电性和热导性高导电性金属薄膜进行修改。至少对于单片法，MEMS桥由三个部分组成，一个弹簧部分(由弹簧钢制成)，一个接触部分(由银制，例如)这些MEMS开关将应用于可调谐和可重构的微波滤波器和天线结构。

The scientific programm of this proposal embraces design, development, optimization and characterization of electrostatically activated capacitive and ohmic microelectromechanical switches (MEMS-switch) by use of spring steel for the bridges of the switches. These bridges will be fabricated in a monolithic way by sputtering of sprong steel and in a hybrid way by bonding of pre-structured spring steel foils to a substrate. For both approaches, the capacitive and ohmic MEMS-bridges will be modified by application of additional electrical and thermaly highly conductive metal films. At least for the monlithic approach, MEMS-bridges consisting of three parts, a spring part (made of spring steel), a contact part (made of Silver, e.g.) and a second spring part (made of spring steel) will be investigated and characterized.These MEMS-swithces will be applied to tunable and reconfigurable microwave filter and antenna structures.