Capacitive and ohmic microelectromechanical switches with bridges made of spring stell, especially for application in high frequency systems

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The scientific programm of this proposal embraces design, development, optimization and characterization of electrostatically activated capacitive and ohmic microelectromechanical switches (MEMS-switch) by use of spring steel for the bridges of the switches. These bridges will be fabricated in a monolithic way by sputtering of sprong steel and in a hybrid way by bonding of pre-structured spring steel foils to a substrate. For both approaches, the capacitive and ohmic MEMS-bridges will be modified by application of additional electrical and thermaly highly conductive metal films. At least for the monlithic approach, MEMS-bridges consisting of three parts, a spring part (made of spring steel), a contact part (made of Silver, e.g.) and a second spring part (made of spring steel) will be investigated and characterized.These MEMS-swithces will be applied to tunable and reconfigurable microwave filter and antenna structures.