Capacitive and ohmic microelectromechanical switches with bridges made of spring stell, especially for application in high frequency systems

带有弹簧钢桥的电容式和欧姆微机电开关，特别适用于高频系统

• 批准号: 233756290
• 负责人: Professor Dr.-Ing. Edmund P. Burte
• 金额: --
• 依托单位: Technische Hochschule Wildau
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2013
• 资助国家: 德国
• 起止时间: 2012-12-31 至 2015-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/233756290?language=en
• 关键词: Capacitive; ohmic; microelectromechanical; switches; bridges

The scientific programm of this proposal embraces design, development, optimization and characterization of electrostatically activated capacitive and ohmic microelectromechanical switches (MEMS-switch) by use of spring steel for the bridges of the switches. These bridges will be fabricated in a monolithic way by sputtering of sprong steel and in a hybrid way by bonding of pre-structured spring steel foils to a substrate. For both approaches, the capacitive and ohmic MEMS-bridges will be modified by application of additional electrical and thermaly highly conductive metal films. At least for the monlithic approach, MEMS-bridges consisting of three parts, a spring part (made of spring steel), a contact part (made of Silver, e.g.) and a second spring part (made of spring steel) will be investigated and characterized.These MEMS-swithces will be applied to tunable and reconfigurable microwave filter and antenna structures.

该提案的科学计划包括设计、开发、优化和表征静电激活的电容和欧姆微机电开关（MEMS开关），通过使用弹簧钢作为开关的桥。这些桥将通过溅射弹簧钢以单片方式制造，并通过将预结构弹簧钢箔粘合到基底以混合方式制造。对于这两种方法，电容性和欧姆MEMS桥将通过应用额外的导电和导热性高的金属膜来修改。至少对于单片方法，MEMS桥由三个部分组成，弹簧部分（由弹簧钢制成）、接触部分（例如由银制成）和接触部分（例如由银制成）。和第二弹簧部分（由弹簧钢制成）的研究和特性。这些MEMS开关将应用于可调谐和可重构的微波滤波器和天线结构。

项目成果

Compact LPF to UWB BPF transition employing quasi-triangular DGS resonators and a discontinuity on the microstrip feed line

• DOI: 10.1109/intee.2015.7416726
• 发表时间: 2015-12
• 期刊: 2015 4th International Conference on Electrical Engineering (ICEE)
• 作者: A. Boutejdar;M. Challal;A. A. Wael-A.;A. Ibrahim;P. Burte

Design of a Novel Ultrawide Stopband Lowpass Filter Using a DMS-DGS Technique for Radar Applications

使用 DMS-DGS 技术设计用于雷达应用的新型超宽阻带低通滤波器

• DOI: 10.1155/2015/101602
• 发表时间: 2015
• 期刊: International Journal of Microwave Science and Technology
• 作者: Boutejdar;Ibrahim
• 通讯作者: Ibrahim

Extracting of compact tunable BPF from LPF using single T-DGS-resonator and 0.25PF/0.5PF Chip Monolithic Ceramic Capacitors

使用单个 T-DGS 谐振器和 0 25PF/0 5PF 片状独石陶瓷电容器从 LPF 中提取紧凑型可调谐 BPF

• DOI: 10.1109/intee.2015.7416727
• 发表时间: 2016
• 期刊: 2015 4th International Conference on Electrical Engineering (ICEE)
• 作者: Boutejdar;Ibrahim;Challal
• 通讯作者: Challal

Design of reconfigurable antenna using RF MEMS switch for cognitive radio applications

• DOI: 10.1109/piers.2017.8261767
• 发表时间: 2017-05
• 期刊: 2017 Progress In Electromagnetics Research Symposium - Spring (PIERS)
• 作者: A. Ibrahim;A. Batmanov;E. Burte

High‐performance wide stop band low‐pass filter using a vertically coupled DGS‐DMS‐resonators and interdigital capacitor

• DOI: 10.1002/mop.28031
• 发表时间: 2014-01
• 期刊: Microwave and Optical Technology Letters
• 影响因子: 1.5
• 作者: A. Boutejdar;A. Omar;E. Burte