Acquisition of an MOVPE System for Electronic Materials Research and Education

0076312 Redwing该奖项为宾夕法尼亚州立大学收购金属有机气相外延（MOVPE）系统提供部分支持，用于氮化铝镓铟（Al，Ga，In）N合金的外延生长。 该MOVPE系统的设计，以促进运输，生长化学，成核和薄膜应力演变的背景下，一个小规模的生产MOVPE工具的基础研究相结合。 MOVPE反应器是定制设计的，结合了原位光学应力测量系统，用于样品曲率和生长速率的真实的时间测量。 该仪器将允许III族和V族源的受控混合，以研究均匀化学对薄膜性能的影响。该设施将大大提高宾夕法尼亚州立大学在电子和光子材料方面的研究和教育机会。 它将为材料科学与工程，电气工程和材料学院间研究生研究计划的研究生和本科生的教育和培训提供跨学科资源。外延生长设施将用于开发电子和光子材料制造和表征以及半导体晶体生长的本科生和研究生课程的课堂活动和问题集。该奖项为宾夕法尼亚州立大学收购金属有机气相外延（MOVPE）系统提供了部分支持。 该设备旨在促进在小规模生产MOVPE工具的背景下进行基本生长研究的结合。 它将使原位测量薄膜应力和生长速率使用高分辨率激光反射计。MOVPE设施将大大提高宾夕法尼亚州立大学电子和光子材料的研究和教育机会。 它将为材料科学与工程，电气工程和材料学院间研究生研究计划的研究生和本科生的教育和培训提供跨学科资源。 外延生长设施将用于开发电子和光子材料制造和表征以及半导体晶体生长的本科生和研究生课程的课堂活动和问题集。

0076312RedwingThis award provides partial support for the acquisition of a metalorganic vapor phase epitaxy (MOVPE) system at Penn State University for the epitaxial growth of aluminum-gallium-indium nitride (Al,Ga,In)N alloys. The MOVPE system is designed to facilitate a combination of fundamental studies of transport, growth chemistry, nucleation and thin film stress evolution within the context of a small-scale production MOVPE tool. The MOVPE reactor is custom designed to incorporate an in-situ optical stress measurement system for real time measurement of sample curvature and growth rate. The instrument will permit controlled mixing of Group III and V sources to enable a study of homogenous chemistry effects on film properties. The facility will significantly enhance research and educational opportunities in electronic and photonic materials at Penn State. It will provide an interdisciplinary resource for the education and training of graduate and undergraduate students from Materials Science and Engineering, Electrical Engineering and the Intercollege Graduate Research Program in Materials. The epitaxial growth facility will be used to develop class activities and problem sets for undergraduate and graduate courses on electronic and photonic materials fabrication and characterization and semiconductor crystal growth.This award provides partial support for the acquisition of a metalorganic vapor phase epitaxy (MOVPE) system at Penn State University. The equipment is designed to facilitate a combination of fundamental growth studies within the context of a small-scale production MOVPE tool. It will enable in-situ measurements of thin film stress and growth rate using high-resolution laser reflectometry. The MOVPE facility will significantly enhance research and educational opportunities in electronic and photonic materials at Penn State. It will provide an interdisciplinary resource for education and training of graduate and undergraduate students from Materials Science and Engineering, Electrical Engineering and the Intercollege Graduate Research Program in Materials. The epitaxial growth facility will be used to develop class activities and problem sets for undergraduate and graduate courses on electronic and photonic materials fabrication and characterization and semiconductor crystal growth.